Metastable structures in the initial stages of Si homoepitaxy

Brian Borovsky, Michael Krueger, Eric D Ganz

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

We discuss the growth of the first six atoms of an epitaxial Si island on Si(001). The nucleation of a six-atom island is observed to rely on a conversion between two metastable four-atom structures. These results suggest that metastable configurations play an important role in epitaxial growth.

Original languageEnglish (US)
Pages (from-to)1053-1056
Number of pages4
JournalSurface Review and Letters
Volume5
Issue number5
DOIs
StatePublished - Jan 1 1998

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