Micro catalytic methane sensors based on 3D quartz structures with cone-shaped cavities etched by high-resolution abrasive sand blasting

Physics & Astronomy

• abrasives 79%
• sands 70%
• methane 61%
• quartz 58%
• cones 57%
• cavities 40%
• sensors 40%
• high resolution 40%
• printing 16%
• catalysts 15%
• mechanical shock 12%
• correlation coefficients 9%
• microelectromechanical systems 8%
• performance 7%
• aluminum oxides 6%
• temperature distribution 6%
• membranes 6%
• fabrication 5%
• sensitivity 4%
• profiles 4%
• silicon 4%
• gases 4%
• metals 4%
• temperature 2%

Engineering & Materials Science

• Blasting 76%
• Quartz 74%
• Abrasives 68%
• Cones 62%
• Methane 62%
• Sand 59%
• Sensors 34%
• Catalysts 14%
• Substrates 11%
• Screen printing 10%
• Alumina 8%
• Printing 8%
• Hot Temperature 8%
• MEMS 7%
• Membranes 7%
• Temperature distribution 6%
• Silicon 6%
• Fabrication 6%
• Electric power utilization 6%
• Metals 5%
• Gases 4%
• Temperature 3%

Chemical Compounds

• Blasting 100%
• Abrasive 81%
• Quartz 58%
• Methane 52%
• Catalyst 18%
• Resistance 14%
• Porosity 12%
• Gas 11%
• Time 8%
• Application 6%