Microfabrication and mechanical characterization of suspended carbon microstructures

Kartikeya Malladi, Wang Chunlei, Marc Madou, Xue Wei, Tianhong Cui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Carbon structures, in micro- or nano-scale, have spread around with widespread interest due to their potential applications in medical devices, sensor applications and microelectronics. This work highlights the successful fabrication of suspended carbon-micro and nano electromechanical systems (C-MEMS/NEMS) by UV/EB lithography and pyrolysis method. The mechanical property of these suspended structures is also investigated with nanoindentation method. Our starting material is a negative photoresist, SU-8. We solve charging problem by forming a thin metal layer before electron beam (EB) writing using various methods, such as EB evaporation, sputtering system, and thermal evaporation. By partly depositing a thin layer of a metal to prevent the repelling of negative charged electrons, we have successfully formed various suspended carbon structures, such as bridges and networks. Young's modulus for a range of load values is calculated and detailed.

Original languageEnglish (US)
Title of host publication2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Pages756-759
Number of pages4
StatePublished - Dec 8 2006
Event2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings - Boston, MA, United States
Duration: May 7 2006May 11 2006

Publication series

Name2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Volume1

Other

Other2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
CountryUnited States
CityBoston, MA
Period5/7/065/11/06

Keywords

  • Carbon-microelectromechanical systems
  • Nanoindentation
  • Photoresist
  • Pyrolysis
  • Suspended structure

Fingerprint Dive into the research topics of 'Microfabrication and mechanical characterization of suspended carbon microstructures'. Together they form a unique fingerprint.

Cite this