Micromachined filters on synthesized substrates

R. F. Drayton; S. Pacheco; J. G. Yook; L. P B Katehi

Micromachined filters on synthesized substrates

R. F. Drayton, S. Pacheco, J. G. Yook, L. P B Katehi

Electrical and Computer Engineering

Research output: Contribution to journal › Conference article › peer-review

13 Scopus citations

Abstract

Effective frequency spectrum usage requires high performance filters with a sharp cut-off frequency and high stopband attenuation. Stepped impedance lowpass designs achieve this with large ratios of high and low impedance values. In high index materials, however, such as Si (11.7) and GaAs (12.9), these ratios are around 5 which significantly limit filter performance. This paper presents the use of Si micromachining to produce synthesized substrates with stepped-impedance low filter designs. Of the two designs, one offers a reduction of the low impedance value while the other offers an increase of the high impedance value to produce Z_H/Z_L ratios that are 1.5 to 2 times larger than conventional designs.

Original language	English (US)
Pages (from-to)	1185-1188
Number of pages	4
Journal	IEEE MTT-S International Microwave Symposium Digest
Volume	3
State	Published - Jan 1 1998
Event	Proceedings of the 1998 IEEE MTT-S International Microwave Symposium. Part 1 (of 3) - Baltimore, MD, USA Duration: Jun 7 1998 → Jun 12 1998

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AU - Pacheco, S.

AU - Yook, J. G.

AU - Katehi, L. P B

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AB - Effective frequency spectrum usage requires high performance filters with a sharp cut-off frequency and high stopband attenuation. Stepped impedance lowpass designs achieve this with large ratios of high and low impedance values. In high index materials, however, such as Si (11.7) and GaAs (12.9), these ratios are around 5 which significantly limit filter performance. This paper presents the use of Si micromachining to produce synthesized substrates with stepped-impedance low filter designs. Of the two designs, one offers a reduction of the low impedance value while the other offers an increase of the high impedance value to produce ZH/ZL ratios that are 1.5 to 2 times larger than conventional designs.

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Micromachined filters on synthesized substrates

Abstract

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