@inproceedings{88f8716f64f24627966746b33c16e6d8,
title = "Micromachined infrared detectors based on pyroelectric thin films",
abstract = "Solid-state micromachining techniques have been used in the fabrication of low-stress silicon nitride thermal isolation structures for pyroelectric detectors. Thin films of PbTiO 3 and other related perovskite materials are integrated on these structures. Process compatibility with NMOS electronics is demonstrated.",
author = "Polla, {Dennis L.} and Baude, {P. F.} and L. Pham and Q. Mei and Choi, {J. R.} and Ye, {Chian Ping} and Francis, {L. F.} and Vu, {Tho T.}",
year = "1995",
language = "English (US)",
isbn = "0819419117",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
number = "2",
pages = "602--611",
editor = "Andresen, {Bjorn F.} and Scholl, {Marija S.}",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
edition = "2",
note = "Infrared Technology XXI. Part 1 (of 2) ; Conference date: 09-07-1995 Through 13-07-1995",
}