@inproceedings{e43aa545643c49fab9bdd9abaf8a3425,
title = "Micromachined negative thermal expansion thin films",
abstract = "Materials with low coefficients of thermal expansion (CTE) are critically important in thin film design to create efficient bimorph actuators and to thermally stabilize structures of low stiffness. We report the first negative thermal expansion (NTE) material (zirconium tungstate) evaporated as a thin film and probe its CTE using a tunable curvature micromirror. The measured CTE of different films are a function of stoichiometry and annealing conditions and CTEs as low as -10×10-6 K-1 were measured. The measurements show no hysteresis after several annealing cycles. Additionally, data on optical constants, elastic modulus, film stoichiometry, and micromirror deflection have been obtained.",
keywords = "Actuators, Biomembranes, Micromirrors, Mirrors, Optical films, Substrates, Temperature, Thermal engineering, Thermal expansion, Transistors",
author = "Sutton, {M. S.} and J. Talghader",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/SENSOR.2003.1216974",
language = "English (US)",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1148--1151",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
note = "12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
}