Micromachined sensor array using thin film resonators

J. Xia, S. Burns, M. Porter, T. Xue, G. Liu, R. Wyse, C. Thielen

Research output: Contribution to journalConference articlepeer-review

10 Scopus citations

Abstract

This paper describes the design, modeling and implementation of a microsensor array using aluminum nitride thin film resonators. A finite element method, formulated to accommodate the anisotropic and piezoelectric properties of aluminum nitride, is used to model acoustic wave coupling between resonators and to define the mask design. Two arrays on the same aluminum nitride membrane were fabricated using standard semiconductor processing. The measurements were in agreement with the modeling. A multilayer Mason model was applied to investigate the mass loading and viscoelastic effects via hydrogen absorption on the PdNi coated TFR. The preliminary H2 sensitivity tests on a TFR hydrogen sensor are also presented.

Original languageEnglish (US)
Pages (from-to)879-884
Number of pages6
JournalProceedings of the Annual IEEE International Frequency Control Symposium
StatePublished - Dec 1 1995
EventProceedings of the 1995 49th Annual IEEE International Frequency Control Symposium - San Francisco, CA, USA
Duration: May 31 1995Jun 2 1995

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