TY - GEN
T1 - Modeling and identification of the dynamics of electrostatically actuated Microcantilever with integrated thermal sensor
AU - Agarwal, Pranav
AU - Sahoo, Deepak
AU - Sebastian, Abu
AU - Pozidis, Haris
AU - Salapaka, Murti V.
PY - 2008
Y1 - 2008
N2 - Microcantilevers that thermally sense the topography of the sample with the ability of electrostatic actuation enable a highly parallel implementation where multiple cantilevers scan the media. Microcantilevers with integrated sensors are used for a variety of applications viz. calorimetry, thermal dip pen lithography, thermal metrology, room temperature chemical vapor deposition in addition to high density data storage application. The dynamics of these cantilevers is governed by a complex interplay of mechanical, thermal, electrostatic and interatomic forces. Such dynamics are analyzed in this paper for operating conditions that are practical for high density data storage applications (≥ Tb/in2) and imaging. Models for a thermo-mechanical cantilever that are tractable for realtime applications as well as a comprehensive characterization of the relevant physical effects and methods for identifying model parameters are developed. The efficacy of the paradigm developed is proven by a comparison with experimental data.
AB - Microcantilevers that thermally sense the topography of the sample with the ability of electrostatic actuation enable a highly parallel implementation where multiple cantilevers scan the media. Microcantilevers with integrated sensors are used for a variety of applications viz. calorimetry, thermal dip pen lithography, thermal metrology, room temperature chemical vapor deposition in addition to high density data storage application. The dynamics of these cantilevers is governed by a complex interplay of mechanical, thermal, electrostatic and interatomic forces. Such dynamics are analyzed in this paper for operating conditions that are practical for high density data storage applications (≥ Tb/in2) and imaging. Models for a thermo-mechanical cantilever that are tractable for realtime applications as well as a comprehensive characterization of the relevant physical effects and methods for identifying model parameters are developed. The efficacy of the paradigm developed is proven by a comparison with experimental data.
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U2 - 10.1109/CDC.2008.4739363
DO - 10.1109/CDC.2008.4739363
M3 - Conference contribution
AN - SCOPUS:62949232012
SN - 9781424431243
T3 - Proceedings of the IEEE Conference on Decision and Control
SP - 2624
EP - 2630
BT - Proceedings of the 47th IEEE Conference on Decision and Control, CDC 2008
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 47th IEEE Conference on Decision and Control, CDC 2008
Y2 - 9 December 2008 through 11 December 2008
ER -