Modellierung von Nanopartikel-Kontamination auf kritischen Oberflächen in der Halbleiterindustrie

Translated title of the contribution: Modeling of nanoparticle contamination on critical surfaces in the semiconductor industry

C. Asbach, J. H. Kim, S. J. Yook, David Y Pui, T. Engelke, H. Fissan, T. Van Der Zwaag

Research output: Contribution to specialist publicationArticle

Translated title of the contributionModeling of nanoparticle contamination on critical surfaces in the semiconductor industry
Original languageGerman
Number of pages1
Volume77
No8
Specialist publicationChemie-Ingenieur-Technik
DOIs
StatePublished - Aug 1 2005

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