Modeling of Three-Dimensional Effects on Temperature Uniformity in Rapid Thermal Processing of Eight Inch Wafers

Engineering & Materials Science

• Rapid thermal processing 100%
• Electric lamps 41%
• Energy transfer 28%
• Temperature 25%
• Radiation 19%
• Pipe flow 15%
• Silicon wafers 15%
• Polysilicon 14%
• Quartz 13%
• Gold 13%
• Thermoanalysis 13%
• Hot Temperature 12%
• Temperature distribution 10%
• Industry 5%
• Experiments 4%

Physics & Astronomy

• wafers 47%
• chambers 39%
• luminaires 35%
• tubes 26%
• energy transfer 20%
• temperature 18%
• radiation 13%
• solid surfaces 12%
• thermal analysis 11%
• reflectors 11%
• quartz 10%
• filaments 10%
• tungsten 10%
• examination 10%
• industries 10%
• temperature distribution 10%
• gold 9%
• rings 8%
• silicon 6%

Chemical Compounds

• Energy Transfer 26%
• Surface 19%
• Filament 15%
• Tungsten 14%
• Quartz 13%
• Thermoanalysis 13%
• Flow 10%