Molybdenum disulfide dc contact MEMS shunt switch

Peng Li, Zheng You, Tianhong Cui

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

Atomic force microscopy pulsed force mode verifies that molybdenum disulfide (MoS2) has a smaller surface adhesion energy than graphene. MEMS switches based on MoS2 may have less stiction problems. Suspended MoS2 two-end fixed beams were fabricated, and their mechanical properties including Young's modulus were characterized by atomic force microscope (AFM) indentation. MoS2 dc contact MEMS (micro-electro-mechanical systems) switches were demonstrated with a pull-in voltage of less than 10 V.

Original languageEnglish (US)
Article number045026
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number4
DOIs
StatePublished - Apr 1 2013

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