Monolithic integration of continuously tunable plasmonic nanostructures

Nathan C. Lindquist; Timothy W. Johnson; David J. Norris; Sang Hyun Oh

doi:10.1021/nl2005737

Monolithic integration of continuously tunable plasmonic nanostructures

Nathan C. Lindquist, Timothy W. Johnson, David J. Norris, Sang Hyun Oh

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

60 Scopus citations

Abstract

We demonstrate precise three-dimensional integration of smooth bumps, grooves, and apertures in optically thick metal films using template stripping. Patterned silicon wafers are used as high-quality, reusable templates. The heights or depths of the metallic features are controlled to within 2 nm, giving continuously tunable optical properties with sharp and intense plasmonic resonances. Furthermore, we demonstrate a pick-and-place template stripping method in situ, enabling versatile three-dimensional micromanipulation, imaging, and characterization of nanoscale devices.

Original language	English (US)
Pages (from-to)	3526-3530
Number of pages	5
Journal	Nano letters
Volume	11
Issue number	9
DOIs	https://doi.org/10.1021/nl2005737
State	Published - Sep 14 2011

Keywords

Template stripping
focused ion beam (FIB)
grating
plasmonics
trapped rainbow

Access

10.1021/nl2005737

OpenUrl availability

Full text

Cite this

@article{8d2ac0ec179d4ccbbd44640cf11e3155,

title = "Monolithic integration of continuously tunable plasmonic nanostructures",

abstract = "We demonstrate precise three-dimensional integration of smooth bumps, grooves, and apertures in optically thick metal films using template stripping. Patterned silicon wafers are used as high-quality, reusable templates. The heights or depths of the metallic features are controlled to within 2 nm, giving continuously tunable optical properties with sharp and intense plasmonic resonances. Furthermore, we demonstrate a pick-and-place template stripping method in situ, enabling versatile three-dimensional micromanipulation, imaging, and characterization of nanoscale devices.",

keywords = "Template stripping, focused ion beam (FIB), grating, plasmonics, trapped rainbow",

author = "Lindquist, {Nathan C.} and Johnson, {Timothy W.} and Norris, {David J.} and Oh, {Sang Hyun}",

year = "2011",

month = sep,

day = "14",

doi = "10.1021/nl2005737",

language = "English (US)",

volume = "11",

pages = "3526--3530",

journal = "Nano letters",

issn = "1530-6984",

publisher = "American Chemical Society",

number = "9",

}

TY - JOUR

T1 - Monolithic integration of continuously tunable plasmonic nanostructures

AU - Lindquist, Nathan C.

AU - Johnson, Timothy W.

AU - Norris, David J.

AU - Oh, Sang Hyun

PY - 2011/9/14

Y1 - 2011/9/14

N2 - We demonstrate precise three-dimensional integration of smooth bumps, grooves, and apertures in optically thick metal films using template stripping. Patterned silicon wafers are used as high-quality, reusable templates. The heights or depths of the metallic features are controlled to within 2 nm, giving continuously tunable optical properties with sharp and intense plasmonic resonances. Furthermore, we demonstrate a pick-and-place template stripping method in situ, enabling versatile three-dimensional micromanipulation, imaging, and characterization of nanoscale devices.

AB - We demonstrate precise three-dimensional integration of smooth bumps, grooves, and apertures in optically thick metal films using template stripping. Patterned silicon wafers are used as high-quality, reusable templates. The heights or depths of the metallic features are controlled to within 2 nm, giving continuously tunable optical properties with sharp and intense plasmonic resonances. Furthermore, we demonstrate a pick-and-place template stripping method in situ, enabling versatile three-dimensional micromanipulation, imaging, and characterization of nanoscale devices.

KW - Template stripping

KW - focused ion beam (FIB)

KW - grating

KW - plasmonics

KW - trapped rainbow

UR - http://www.scopus.com/inward/record.url?scp=80052793647&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80052793647&partnerID=8YFLogxK

U2 - 10.1021/nl2005737

DO - 10.1021/nl2005737

M3 - Article

C2 - 21834564

AN - SCOPUS:80052793647

SN - 1530-6984

VL - 11

SP - 3526

EP - 3530

JO - Nano letters

JF - Nano letters

IS - 9

ER -

Monolithic integration of continuously tunable plasmonic nanostructures

Abstract

Keywords

Access

OpenUrl availability

Other files and links

Fingerprint

Cite this