Abstract
We demonstrate precise three-dimensional integration of smooth bumps, grooves, and apertures in optically thick metal films using template stripping. Patterned silicon wafers are used as high-quality, reusable templates. The heights or depths of the metallic features are controlled to within 2 nm, giving continuously tunable optical properties with sharp and intense plasmonic resonances. Furthermore, we demonstrate a pick-and-place template stripping method in situ, enabling versatile three-dimensional micromanipulation, imaging, and characterization of nanoscale devices.
Original language | English (US) |
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Pages (from-to) | 3526-3530 |
Number of pages | 5 |
Journal | Nano letters |
Volume | 11 |
Issue number | 9 |
DOIs | |
State | Published - Sep 14 2011 |
Keywords
- Template stripping
- focused ion beam (FIB)
- grating
- plasmonics
- trapped rainbow