An accurate and fast dynamical theory for calculating reflection high-energy electron diffraction (RHEED) rocking-curve intensities at 10-40 keV is presented. The application of RHEED to surface structural analysis is demonstrated for the first time on a reconstructed surface by comparing data to calculated spectra for GaAs(110). The technique is highly sensitive to structural changes along specific directions due to its forward-scattering geometry.
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We thank Drs. S. Nagano, Y. Huang and K.A. Feng for programming help. Special thanks go to Dr. C. Schwartz for discussions concerning the R-matrix method. Dr. P.R. Pukite assisted in the data acquisition and analysis. This work is supported by NSF, Grants DMR-8405049 and DMR-8615207 and NCSA, Illinois.