Nanoindentation and microstructural studies of Al/TiN multilayers with unequal volume fractions

D. Bhattacharyya, N. A. Mara, R. G. Hoagland, A. Misra

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

The mechanical behavior of nanoscale Al/TiN multilayers with a thickness ratio of 9:1 deposited by reactive sputter deposition, with TiN layer thicknesses of 1-50 nm, has been evaluated. Hardness values measured by nanoindentation methods showed considerably higher hardness than a rule of mixtures estimate, and increasing hardness with decreasing layer thickness. Microstructural analysis has been performed using transmission electron microscopy (TEM) and high-resolution TEM. A dislocation image force model is used to understand the strengthening mechanisms.

Original languageEnglish (US)
Pages (from-to)981-984
Number of pages4
JournalScripta Materialia
Volume58
Issue number11
DOIs
StatePublished - Jun 1 2008

Keywords

  • Al-TiN
  • Multilayers
  • Nanoindentation

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