Nanotrenches: An Optical Lithography Process for High-Aspect-Ratio sub-100 nm Gaps

J-F Dayen, V Faramarzi, B Doudin

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Nanotechnology has now developed to an extent that its procedures and applications are being widely employed in scientific research and industrial production. By utilizing the properties of specifically made structures at the micron and sub-micron scales new functionalities have become possible in materials and devices. These, in turn, are enabling a new generation of products in electronics, photonics, biotechnology and other areas dependent on high performance structured materials. This book provides several examples of how diverse nanofabrication techniques are being used by researchers across the world to fabricate useful materials and devices. A number of research groups present their cutting-edge work on fabricating a variety of nanoscale structures such as split rings, wires, gaps, trenches and holes. The innovative techniques described in this book will be of interest to all who are engaged in research and development of nanofabrication technologies. The book mainly covers application areas in electronics and photonics but the techniques are general enough to be applied to other areas as well. The material in this book has been contributed by prominent researchers in some of the most well-known research labs in the world. Its contents, therefore, provide a concise but fairly complete overview of the state-of-the-art in nanofabrication technologies in the world today.
Original languageEnglish
Title of host publicationVistas in Nanofabrication
EditorsFaiz Rahman
PublisherPan Stanford
Pages115-133
ISBN (Print)9789814364560
DOIs
StatePublished - Aug 31 2012

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