Nonthermal Plasma Synthesis of Silicon Nanocrystals

Lorenzo Mangolini; Uwe Kortshagen

doi:10.1002/9783527629954.ch13

Nonthermal Plasma Synthesis of Silicon Nanocrystals

Lorenzo Mangolini, Uwe Kortshagen

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Chapter

3 Scopus citations

Original language	English (US)
Title of host publication	Silicon Nanocrystals
Subtitle of host publication	Fundamentals, Synthesis and Applications
Publisher	Wiley-VCH
Pages	309-348
Number of pages	40
ISBN (Print)	9783527321605
DOIs	https://doi.org/10.1002/9783527629954.ch13
State	Published - Apr 29 2010

Keywords

Amorphous silicon films
Background gas
Crystalline silicon
Particle nucleation
Particle size distribution
Silane plasmas

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10.1002/9783527629954.ch13

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@inbook{4121b080616442dc931321e65657bddc,

title = "Nonthermal Plasma Synthesis of Silicon Nanocrystals",

keywords = "Amorphous silicon films, Background gas, Crystalline silicon, Particle nucleation, Particle size distribution, Silane plasmas",

author = "Lorenzo Mangolini and Uwe Kortshagen",

year = "2010",

month = apr,

day = "29",

doi = "10.1002/9783527629954.ch13",

language = "English (US)",

isbn = "9783527321605",

pages = "309--348",

booktitle = "Silicon Nanocrystals",

publisher = "Wiley-VCH",

}

TY - CHAP

T1 - Nonthermal Plasma Synthesis of Silicon Nanocrystals

AU - Mangolini, Lorenzo

AU - Kortshagen, Uwe

PY - 2010/4/29

Y1 - 2010/4/29

KW - Amorphous silicon films

KW - Background gas

KW - Crystalline silicon

KW - Particle nucleation

KW - Particle size distribution

KW - Silane plasmas

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U2 - 10.1002/9783527629954.ch13

DO - 10.1002/9783527629954.ch13

M3 - Chapter

AN - SCOPUS:84888707598

SN - 9783527321605

SP - 309

EP - 348

BT - Silicon Nanocrystals

PB - Wiley-VCH

ER -

Nonthermal Plasma Synthesis of Silicon Nanocrystals

Keywords

UN SDGs

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