Novel MEMS stiffness sensor for in-vivo tissue characterization measurement

P. Peng, A. S. Sezen, R. Rajamani, A. G. Erdman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations

Abstract

This paper presents the design, mathematical model, fabrication and testing of a novel type of in-vivo stiffness sensor. The proposed sensor can measure both tissue stiffness and contact force. The sensing concept utilizes multiple membranes with varying stiffness and is particularly designed for integration with minimally invasive surgical (MIS) tools. In order to validate the new sensing concept, MEMS capacitive sensors are fabricated using surface micromachining with each fabricated sensor having a 1mm x 1mm active sensor area. Finally, the sensors are tested by touching polymers of different elastic stiffnesses. The results are promising and confirm the capability of the sensor for measuring both force and tissue compliance.

Original languageEnglish (US)
Title of host publicationProceedings of the 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009
Subtitle of host publicationEngineering the Future of Biomedicine, EMBC 2009
PublisherIEEE Computer Society
Pages6640-6643
Number of pages4
ISBN (Print)9781424432967
DOIs
StatePublished - 2009
Event31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009 - Minneapolis, MN, United States
Duration: Sep 2 2009Sep 6 2009

Publication series

NameProceedings of the 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009

Other

Other31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009
CountryUnited States
CityMinneapolis, MN
Period9/2/099/6/09

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