TY - GEN
T1 - Novel MEMS stiffness sensor for in-vivo tissue characterization measurement
AU - Peng, P.
AU - Sezen, A. S.
AU - Rajamani, R.
AU - Erdman, A. G.
PY - 2009
Y1 - 2009
N2 - This paper presents the design, mathematical model, fabrication and testing of a novel type of in-vivo stiffness sensor. The proposed sensor can measure both tissue stiffness and contact force. The sensing concept utilizes multiple membranes with varying stiffness and is particularly designed for integration with minimally invasive surgical (MIS) tools. In order to validate the new sensing concept, MEMS capacitive sensors are fabricated using surface micromachining with each fabricated sensor having a 1mm x 1mm active sensor area. Finally, the sensors are tested by touching polymers of different elastic stiffnesses. The results are promising and confirm the capability of the sensor for measuring both force and tissue compliance.
AB - This paper presents the design, mathematical model, fabrication and testing of a novel type of in-vivo stiffness sensor. The proposed sensor can measure both tissue stiffness and contact force. The sensing concept utilizes multiple membranes with varying stiffness and is particularly designed for integration with minimally invasive surgical (MIS) tools. In order to validate the new sensing concept, MEMS capacitive sensors are fabricated using surface micromachining with each fabricated sensor having a 1mm x 1mm active sensor area. Finally, the sensors are tested by touching polymers of different elastic stiffnesses. The results are promising and confirm the capability of the sensor for measuring both force and tissue compliance.
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U2 - 10.1109/IEMBS.2009.5332865
DO - 10.1109/IEMBS.2009.5332865
M3 - Conference contribution
C2 - 19963926
AN - SCOPUS:77951001714
SN - 9781424432967
T3 - Proceedings of the 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009
SP - 6640
EP - 6643
BT - Proceedings of the 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009
PB - IEEE Computer Society
T2 - 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009
Y2 - 2 September 2009 through 6 September 2009
ER -