Oxidation sharpening, template stripping, and passivation of ultra-sharp metallic pyramids and wedges

Hyungsoon Im; Sang Hyun Oh

doi:10.1002/smll.201301475

Oxidation sharpening, template stripping, and passivation of ultra-sharp metallic pyramids and wedges

Hyungsoon Im, Sang Hyun Oh

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al ₂O₃ shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.

Original language	English (US)
Pages (from-to)	680-684
Number of pages	5
Journal	Small
Volume	10
Issue number	4
DOIs	https://doi.org/10.1002/smll.201301475
State	Published - Feb 26 2014

Keywords

atomic layer deposition
metallic pyramid
near-field optical microscopy
plasmonic nanofocusing
template stripping

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abstract = "Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al 2O3 shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.",

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KW - template stripping

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Oxidation sharpening, template stripping, and passivation of ultra-sharp metallic pyramids and wedges

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Keywords

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