Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al 2O3 shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.
- atomic layer deposition
- metallic pyramid
- near-field optical microscopy
- plasmonic nanofocusing
- template stripping