TY - GEN
T1 - Patterning anodic porous alumina with resist developers for patterned nanowire formation
AU - Lee, Seungyeon
AU - Wratkowski, Daniel
AU - Cho, Jeong Hyun
PY - 2015/1/1
Y1 - 2015/1/1
N2 - Formation of patterned metal and semiconductor (e.g. silicon) nanowires is achieved using anodic aluminum oxide (AAO) templates with porous structures of different heights resulting from an initial step difference made by etching the aluminum (Al) thin film with a photoresist developer prior to the anodization process. This approach allows for the growth of vertically aligned nanowire arrays on a metal substrate, instead of an oriented semiconductor substrate, using an electroplating or a chemical vapor deposition (CVD) process The vertically aligned metal and semiconductor nanowires defined on a metal substrate could be applied to the realization of vertical 3D transistors, field emission devices, or nano-micro sensors for biological applications.
AB - Formation of patterned metal and semiconductor (e.g. silicon) nanowires is achieved using anodic aluminum oxide (AAO) templates with porous structures of different heights resulting from an initial step difference made by etching the aluminum (Al) thin film with a photoresist developer prior to the anodization process. This approach allows for the growth of vertically aligned nanowire arrays on a metal substrate, instead of an oriented semiconductor substrate, using an electroplating or a chemical vapor deposition (CVD) process The vertically aligned metal and semiconductor nanowires defined on a metal substrate could be applied to the realization of vertical 3D transistors, field emission devices, or nano-micro sensors for biological applications.
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U2 - 10.1557/opl.2015.566
DO - 10.1557/opl.2015.566
M3 - Conference contribution
AN - SCOPUS:84983414463
T3 - Materials Research Society Symposium Proceedings
SP - 13
EP - 18
BT - Semiconductor Nanowires and Devices for Advanced Applications
A2 - Arbiol, Jordi
A2 - Filler, Michael A.
A2 - Xiong, Qihua
A2 - Fontcuberta i Morral, Anna
A2 - Thelander, Kimberly Dick
PB - Materials Research Society
T2 - 2015 MRS Spring Meeting
Y2 - 6 April 2015 through 10 April 2015
ER -