Patterning of Layer-by-Layer Self-Assembled Multiple Types of Nanoparticle Thin Films by Lithographic Technique

Engineering & Materials Science

• Nanoparticles 100%
• Thin films 95%
• Polystyrenes 69%
• Aluminum 62%
• Self assembly 53%
• Photoresists 51%
• Silicon wafers 48%
• Silica nanoparticles 30%
• Nanocrystals 30%
• Wet etching 28%
• Microelectronics 21%
• Plasmas 18%
• Industrial applications 18%
• Oxygen 16%
• Silicon 15%
• Scanning 15%
• Air 11%

Physics & Astronomy

• nanoparticles 68%
• thin films 52%
• aluminum 46%
• polystyrene 45%
• photoresists 35%
• self assembly 35%
• silicon 27%
• wafers 25%
• oxygen plasma 19%
• microelectronics 17%
• nanocrystals 14%
• electron microscopes 13%
• silicon dioxide 12%
• etching 12%
• scanning 10%
• air 10%

Chemical Compounds

• Nanoparticle 50%
• Microelectronics 22%
• Surface 19%
• Etching 18%
• Sphere 17%
• Nanocrystal 16%
• Plasma 12%
• Electron Particle 10%
• Dioxygen 9%
• Application 6%