@inproceedings{9b3d0734353e4e36963aadb995c8c254,
title = "Photonic integration of nano-electro-mechanical systems",
keywords = "Gradient optical force, Nanophotonics, NEMS, Optomechanics, Photonic cantilever",
author = "Mo Li and Wolfram Pernice and Hong Tang",
year = "2010",
month = dec,
day = "1",
doi = "10.1109/PHOTONICS.2010.5698874",
language = "English (US)",
isbn = "9781424453689",
pages = "291--292",
booktitle = "2010 23rd Annual Meeting of the IEEE Photonics Society, PHOTINICS 2010",
note = "23rd Annual Meeting of the IEEE Photonics Society, PHOTINICS 2010 ; Conference date: 07-11-2010 Through 11-11-2010",
}