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Plasma and photon interactions with organosilicon polymers for directed self-assembly patterning applications
Laurent Azarnouche, Stephen M. Sirard, William J. Durand, Gregory Blachut, Emir Gurer, Diane J. Hymes, Christopher J. Ellison, Carlton G. Willson, David B. Graves
Research output: Contribution to journal › Article › peer-review
10
Scopus
citations