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Plasma-enhanced atomic layer deposition for plasmonic TiN
Lauren M. Otto, Aaron T. Hammack, Shaul Aloni, D. Frank Ogletree, Deirdre L. Olynick, Scott Dhuey, Bethanie J.H. Stadler, Adam M. Schwartzberg
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
7
Scopus
citations