Abstract
The objective of this research is to develop a highly sensitive acoustic wave sensor using a tunneling current. The tunneling current device is fabricated with the hot embossing technology. Since polymethyl methacrylate (PMMA) is less expensive, has little stiffness, and is easier to work with micro-machining process compared to traditional silicon-based tunneling sensors, we fabricate the tip structure on the material using the hot embossing process. First, the frequency response of the tunneling device is measured by a piezoelectric transducer (PZT) and laser vibrometer to find the resonance frequency. Then the performance of the device is characterized by measuring the acoustic wave, which has the resonance frequency.
Original language | English (US) |
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Title of host publication | 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 1275-1278 |
Number of pages | 4 |
ISBN (Electronic) | 9781665412674 |
DOIs | |
State | Published - Jun 20 2021 |
Event | 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States Duration: Jun 20 2021 → Jun 25 2021 |
Publication series
Name | 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 |
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Conference
Conference | 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 |
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Country/Territory | United States |
City | Virtual, Online |
Period | 6/20/21 → 6/25/21 |
Bibliographical note
Funding Information:This work is supported by MnDRIVE—Minnesota’s Discovery, Research, and InnoVation Economy.
Funding Information:
The authors acknowledge the fabrication and characterization assistance provided by the Minnesota Nano Center and the Characterization Facility at the University of Minnesota.
Publisher Copyright:
© 2021 IEEE.
Keywords
- Acoustic wave
- Hot embossing
- PMMA
- PZT
- Tunneling current