@inproceedings{8c6ed41f1533439d83124c57d1f6615e,
title = "Precision micromotor for surgery",
abstract = "A silicon-based piezoelectric linear stepper motor has been designed and fabricated. The motor is based on an inertial drive concept derived from sequential electrostatic clamping and unclamping of a piezoelectric bar measuring 38.1 × 6.36 × 0.787 mm. The piezoelectric micromotor has been constructed and tested for precision surgical applications. The measured performance is dependent on the operating conditions selected. Representative performance is a speed of 1.2 mm/s against a 3.0 N load. The motor is limited in its travel by approximately the diameter of the silicon wafer used to fabricated it. The resolution of the motor is less than 100 nm in its most precise actuation mode.",
author = "D. Polla and A. Erdman and D. Peichel and R. Rizq and Y. Gao and D. Markus",
year = "2000",
month = jan,
day = "1",
doi = "10.1109/MMB.2000.893766",
language = "English (US)",
series = "1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "180--183",
editor = "Andre Dittmar and David Beebe",
booktitle = "1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings",
note = "1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, MMB 2000 ; Conference date: 12-10-2000 Through 14-10-2000",
}