Preparation of hollow out-of-plane hafnium oxide microneedle arrays for transdermal drug delivery

Physics & Astronomy

• hafnium oxides 77%
• drugs 57%
• delivery 54%
• hollow 51%
• preparation 41%
• wafers 35%
• silicon 20%
• oxide films 16%
• masks 16%
• silicon polymers 14%
• photoresists 9%
• macromolecules 9%
• silicon oxides 9%
• atomic layer epitaxy 9%
• safety 9%
• flexibility 8%
• baths 8%
• etching 7%
• fabrication 5%
• water 5%
• ions 4%
• temperature 2%

Engineering & Materials Science

• Hafnium oxides 100%
• Drug delivery 76%
• Silicon wafers 34%
• Oxide films 23%
• Molds 22%
• Masks 17%
• Atomic layer deposition 14%
• Silicon oxides 13%
• Macromolecules 13%
• Reactive ion etching 12%
• Photoresists 12%
• Skin 8%
• Silicon 7%
• Fabrication 7%
• Polymers 6%
• Water 5%
• Temperature 3%

Chemical Compounds

• Transdermal 74%
• Hafnium Atom 67%
• Oxide 30%
• Drug 30%
• Silicon Oxide 11%
• Atomic Layer Epitaxy 10%
• Liquid Film 9%
• Etching 8%
• Safety 8%
• Macromolecule 8%
• Flexibility 7%
• Strength 6%
• Ion 3%
• Time 3%
• Application 2%