Fingerprint
Dive into the research topics of 'Pressure and frequency dependence of ion bombardment energy distributions from rf discharges'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Pressure and frequency dependence of ion bombardment energy distributions from rf discharges
M. F. Toups, D. W. Ernie
Research output: Contribution to journal › Article › peer-review
19
Scopus
citations