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Probing plasma/surface interactions
Eray S. Aydil
, Richard A. Gottscho
Chemical Engineering and Materials Science
Research output
:
Contribution to specialist publication
›
Article
11
Scopus citations
Overview
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Engineering & Materials Science
Beam plasma interactions
100%
Plasmas
58%
Surface cleaning
32%
Plasma etching
31%
Plasma enhanced chemical vapor deposition
29%
Fourier transform infrared spectroscopy
26%
Fourier transforms
20%
Thin films
19%
Cleaning
19%
Infrared radiation
18%
Silicon
16%
Chemical analysis
13%
Chemical Compounds
Attenuated Total Reflection
68%
Plasma
39%
Plasma Enhanced Chemical Vapour Deposition
38%
Fourier Transform Infrared Spectroscopy
35%
Etching
28%
Surface
20%
Physics & Astronomy
surface reactions
65%
cleaning
41%
plasma etching
23%
infrared spectroscopy
18%
vapor deposition
16%
silicon
11%
thin films
10%