Processing and characterization of piezoelectric materials and integration into microelectromechanical systems

Dennis L. Polla; Lorraine F. Francis

doi:10.1146/annurev.matsci.28.1.563

Processing and characterization of piezoelectric materials and integration into microelectromechanical systems

Dennis L. Polla, Lorraine F. Francis

Chemical Engineering and Materials Science

Research output: Contribution to journal › Article › peer-review

283 Scopus citations

Abstract

Piezoelectric materials have been integrated with silicon microelectromechanical systems (MEMS) in both microsensor and microactuator applications. Thin-film materials selection and processing routes are reviewed. Some recent and emerging applications of piezoelectric MEMS are presented including acoustic emission microsensors, vibration monitors, molecular recognition biosensors, precision positioners, micropumps, and linear stepper motors.

Original language	English (US)
Pages (from-to)	563-597
Number of pages	35
Journal	Annual Review of Materials Science
Volume	28
Issue number	1
DOIs	https://doi.org/10.1146/annurev.matsci.28.1.563
State	Published - 1998

Keywords

Actuators
Ferroelectric
MEMS
Sensors

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Processing and characterization of piezoelectric materials and integration into microelectromechanical systems

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