TY - JOUR
T1 - Processing and piezoelectric properties of MOD PZT films and PZT/polymer composite coatings
AU - Wright, J. S.
AU - Francis, Lorraine F
PY - 1996/12/1
Y1 - 1996/12/1
N2 - Lead zirconate titanate, Pb(Zr0.53Ti0.47)O3 (PZT), coatings were prepared using a metallorganic decomposition (MOD) route with lead and titanium acetates and zirconium acetylacetonate in acetic acid and water. Films with thickness of 0.66 μm were prepared on (100) Si with a layered bottom electrode (Pt/Ti/TiO2/SiO2). Dielectric constant and loss were 1100 and 0.04 (1 kHz), respectively, and remnant polarization and coercive field were 30 μC/cm2 and 40 kV/cm. Piezoelectric coefficient (d33) of the PZT film, measured with a single-beam laser interferometer, was 41 pm/V. Standard micromachining techniques were used to etch the PZT to form discrete PZT posts for preparation of the ceramic phase for composite coatings with a 1-3 connectivity. SEM was used to determine the dense and etched film microstructure. Preliminary ion milling results, used to etch the PZT, are also presented.
AB - Lead zirconate titanate, Pb(Zr0.53Ti0.47)O3 (PZT), coatings were prepared using a metallorganic decomposition (MOD) route with lead and titanium acetates and zirconium acetylacetonate in acetic acid and water. Films with thickness of 0.66 μm were prepared on (100) Si with a layered bottom electrode (Pt/Ti/TiO2/SiO2). Dielectric constant and loss were 1100 and 0.04 (1 kHz), respectively, and remnant polarization and coercive field were 30 μC/cm2 and 40 kV/cm. Piezoelectric coefficient (d33) of the PZT film, measured with a single-beam laser interferometer, was 41 pm/V. Standard micromachining techniques were used to etch the PZT to form discrete PZT posts for preparation of the ceramic phase for composite coatings with a 1-3 connectivity. SEM was used to determine the dense and etched film microstructure. Preliminary ion milling results, used to etch the PZT, are also presented.
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M3 - Conference article
AN - SCOPUS:0030403965
SN - 0272-9172
VL - 433
SP - 357
EP - 362
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
T2 - Proceedings of the 1996 MRS Spring Symposium
Y2 - 8 April 1996 through 12 April 1996
ER -
