Properties of Nb-doped lead scandium niobate titanate thin films prepared by a sol-gel method

C. R. Cho, D. E. Drinkwater, L. F. Francis, D. L. Polla

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Lead scandium niobate titanate (Pb[Sc1/2Nb1/2)0.57Ti0.43]O 3) thin films with 0.5 mol% Nb doping were prepared by a sol-gel method. Films annealed at temperatures greater than 600°C crystallized into a single phase perovskite structure. The films were transparent and crack-free with uniform thickness and an average grain size of 1.1 μm. The dielectric constant and dissipation factor measured at 1 kHz for a film annealed at 700°C were 1370 and 0.022, respectively. Ferroelectricity was confirmed by the presence of hysteresis loops, with a remanent polarization of 20 μC/cm2 and coercive field of 35 kV/cm. The piezoelectric coefficient (d33) of a poled film was 98 pm/V. Dielectric, ferroelectric, and piezoelectric properties of the films were enhanced through annealing and poling after deposition of the top gold electrode.

Original languageEnglish (US)
Pages (from-to)136-140
Number of pages5
JournalMaterials Letters
Issue number2
StatePublished - Jan 1999


  • 68.55.Jk
  • 77.65.Bn
  • 77.84.-s
  • 81.15.Lm
  • 82.80.Pv
  • Lead scandium niobate titanate
  • Microelectromechanical systems
  • Piezoelectric coefficient
  • Sol-gel
  • Thin film

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