Radio-frequency reactively sputtered VOx thin films deposited at different oxygen flows

A. Lourenço, A. Gorenstein, S. Passerini, W. H. Smyrl, M. C.A. Fantini, M. H. Tabacniks

Research output: Contribution to journalArticlepeer-review

23 Scopus citations


The effect of different oxygen flow rate on the properties of vanadium oxide thin films formed by radio-frequency, reactive sputtering deposition are investigated. The stoichiometry of the as-deposited films was investigated by Rutherford backscattering spectrometry. For high oxygen flows, films were mainly V2O5 while a lower oxide was obtained at the lowest flow. Forward recoil spectrometry indicated a significant hydrogen content in the thin films. X-ray diffraction showed that the films were amorphous. The electrochromism shown by such films upon lithium intercalation was also studied. Samples deposited at high oxygen flow were transparent/yellow, and showed a somewhat complicated electrochromic behavior. Upon lithium insertion up to 25 mC/cm2, the films acted as cathodically coloring materials at wavelengths higher than 500 nm and as anodically coloring material at lower wavelengths. For the higher insertion levels, the opposite behavior was observed. Samples deposited at very low O2 flows showed no electrochromic behavior.

Original languageEnglish (US)
Pages (from-to)706-711
Number of pages6
JournalJournal of the Electrochemical Society
Issue number2
StatePublished - Feb 1998


Dive into the research topics of 'Radio-frequency reactively sputtered VO<sub>x</sub> thin films deposited at different oxygen flows'. Together they form a unique fingerprint.

Cite this