TY - JOUR
T1 - Raman and XPS characterization of vanadium oxide thin films deposited by reactive RF sputtering
AU - Cazzanelli, E.
AU - Mariotto, G.
AU - Passerini, S.
AU - Smyrl, W. H.
AU - Gorenstein, A.
PY - 1999/1/1
Y1 - 1999/1/1
N2 - In this paper we report on Raman and XPS characterization of vanadium oxide thin films deposited by RF-sputtering. The samples were deposited by using a vanadium target in different oxygen fluxes, so that the stoichiometry (O/V ratio) of the oxide was varied. Several physical parameters of the films indicate a strong structural difference between the sample deposited at lower oxygen flux (1 see m) and those obtained with higher flux (from 1.25 to 9 sec m). The increase of O/V ratio corresponds to a lower crystallinity of the thin films as indicated by the initial lowering and the final disappearance of the characteristic Raman mode of V2O5 (crystal) at about 140 cm-1. For the highest flux samples new broad bands develop, typical of amorphous materials, both in polarized as well as in depolarized Raman spectra.
AB - In this paper we report on Raman and XPS characterization of vanadium oxide thin films deposited by RF-sputtering. The samples were deposited by using a vanadium target in different oxygen fluxes, so that the stoichiometry (O/V ratio) of the oxide was varied. Several physical parameters of the films indicate a strong structural difference between the sample deposited at lower oxygen flux (1 see m) and those obtained with higher flux (from 1.25 to 9 sec m). The increase of O/V ratio corresponds to a lower crystallinity of the thin films as indicated by the initial lowering and the final disappearance of the characteristic Raman mode of V2O5 (crystal) at about 140 cm-1. For the highest flux samples new broad bands develop, typical of amorphous materials, both in polarized as well as in depolarized Raman spectra.
KW - RF sputtering
KW - Raman and XPS characterization
KW - Vanadium oxide thin films
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U2 - 10.1016/S0927-0248(98)00135-4
DO - 10.1016/S0927-0248(98)00135-4
M3 - Article
AN - SCOPUS:0032736968
VL - 56
SP - 249
EP - 258
JO - Solar Energy Materials and Solar Cells
JF - Solar Energy Materials and Solar Cells
SN - 0927-0248
IS - 3-4
ER -