Real time estimation of equivalent cantilever parameters in tapping mode atomic force microscopy

Pranav Agarwal, Murti V. Salapaka

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

In this article, a method of imaging is developed, where during tapping-mode operation, equivalent resonant frequency and quality factor can be obtained in real time. It involves exciting the cantilever near its resonant frequency and two other frequencies chosen close to the resonant frequency. It is shown that changes in equivalent cantilever parameters can be registered for topography changes that are less than 1 nm in height and within 400 μs of the change occurring. The estimation time is two orders of magnitude better than current techniques.

Original languageEnglish (US)
Article number083113
JournalApplied Physics Letters
Volume95
Issue number8
DOIs
StatePublished - 2009

Bibliographical note

Funding Information:
The authors were partly supported by NSF Grant ECCS 0802117.

Copyright:
Copyright 2009 Elsevier B.V., All rights reserved.

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