Real-time, in situ monitoring of surface reactions during plasma passivation of GaAs

Eray S. Aydil, Zhen Zhou, Konstantinos P. Giapis, Yves Chabal, Jeffrey A. Gregus, Richard A. Gottscho

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Fingerprint

Dive into the research topics of 'Real-time, in situ monitoring of surface reactions during plasma passivation of GaAs'. Together they form a unique fingerprint.

Physics & Astronomy