Robust Control Approach to Atomic Force Microscopy

Abu Sebastian, Murti V. Salapaka, Jason P. Cleveland

Research output: Chapter in Book/Report/Conference proceedingConference contribution

34 Scopus citations

Abstract

The Imaging problem using an Atomic Force Microscope (AFM) is addressed in the framework of modern robust control. Subsequently stacked H and Glover McFarlane controllers are designed for high bandwidth and robustness. It is postulated that the sample profile can be accurately imaged without building explicit observers. Experimental results substantiate this claim.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Conference on Decision and Control
Pages3443-3444
Number of pages2
DOIs
StatePublished - Dec 1 2003
Event42nd IEEE Conference on Decision and Control - Maui, HI, United States
Duration: Dec 9 2003Dec 12 2003

Publication series

NameProceedings of the IEEE Conference on Decision and Control
Volume4
ISSN (Print)0191-2216

Other

Other42nd IEEE Conference on Decision and Control
Country/TerritoryUnited States
CityMaui, HI
Period12/9/0312/12/03

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