Scanning laser acoustic microscope with digital data acquisition

E. P. Rudd, R. K. Mueller, W. P. Robbins, T. Skaar, B. Soumekh, Z. Q. Zhou

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

A scanning laser acoustic microscope (SLAM) is described. The SLAM achieves a resolution of about 10 μm and is capable of imaging subsurface features at depths up to several millimeters, using appropriate reconstruction algorithms. The various components of the apparatus, both acousto-optical and electronic, are described. A major feature of the SLAM is a digital data-acquisition system capable of storing and processing the complex acoustic field in images with 256 × 256-pixel resolution. An array processor enables most floating-point operations to be completed in a few seconds. Examples of acoustic images obtained from a test sample are presented.

Original languageEnglish (US)
Pages (from-to)45-53
Number of pages9
JournalReview of Scientific Instruments
Volume58
Issue number1
DOIs
StatePublished - 1987

Bibliographical note

Copyright:
Copyright 2007 Elsevier B.V., All rights reserved.

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