Silicon metal-oxide-semiconductor field-effect transistor with gate structures defined by scanned probe lithography

M. S. Hagedorn, D. D. Litfin, G. M. Price, A. E. Gordon, T. K. Higman

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Fingerprint

Dive into the research topics of 'Silicon metal-oxide-semiconductor field-effect transistor with gate structures defined by scanned probe lithography'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy