TY - JOUR
T1 - Smart H2 sensor array of QCMs coated with PdNi alloy of various thicknesses
AU - Liu, G.
AU - Porter, M. D.
AU - Bastiaans, G. J.
AU - Burns, S.
PY - 1995/12/1
Y1 - 1995/12/1
N2 - This paper describes some of our results in developing high performance hydrogen gas sensors using piezoelectric devices (i.e., Quartz Crystal Microbalances (QCMs) and Thin Film Resonators (TFRs)) coated with a PdNi (90/10) alloy. A sensor array has been built by coating quartz crystals with various PdNi thicknesses and tested via expose to H2 in N2 in the concentration range from 20 to 500 ppm. The performance of the sensor array has been also characterized in the presence of various potential interference gases and vapors, such as carbon dioxide, nitrous oxide, water, toluene, acetone, acetonitrile, hexane, methyl isobutylketone, methylene chloride, and ethanol. Using the unique chemistry of Pd-H2 system, we have developed an relatively straightforward method to compensate for contributions from the mentioned potential interference gases.
AB - This paper describes some of our results in developing high performance hydrogen gas sensors using piezoelectric devices (i.e., Quartz Crystal Microbalances (QCMs) and Thin Film Resonators (TFRs)) coated with a PdNi (90/10) alloy. A sensor array has been built by coating quartz crystals with various PdNi thicknesses and tested via expose to H2 in N2 in the concentration range from 20 to 500 ppm. The performance of the sensor array has been also characterized in the presence of various potential interference gases and vapors, such as carbon dioxide, nitrous oxide, water, toluene, acetone, acetonitrile, hexane, methyl isobutylketone, methylene chloride, and ethanol. Using the unique chemistry of Pd-H2 system, we have developed an relatively straightforward method to compensate for contributions from the mentioned potential interference gases.
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M3 - Conference article
AN - SCOPUS:0029512823
SN - 0161-6404
SP - 876
EP - 878
JO - Proceedings of the Annual IEEE International Frequency Control Symposium
JF - Proceedings of the Annual IEEE International Frequency Control Symposium
T2 - Proceedings of the 1995 49th Annual IEEE International Frequency Control Symposium
Y2 - 31 May 1995 through 2 June 1995
ER -