Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

Fredrik Nikolajeff, Todd A. Ballen, James R. Leger, Anand Gopinath, Tzu Chen Lee, Robert C. Williams

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers VCSEL’s!. The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-mm-diameter VCSEL’s with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.

Original languageEnglish (US)
Pages (from-to)3030-3038
Number of pages9
JournalApplied Optics
Volume38
Issue number14
DOIs
StatePublished - May 10 1999

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