Stiction-free soft landing for infrared thermal detectors

Yuyan Wang, Joseph J Talghader

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Micromachined structures that repeatedly contact their substrate must be actuated in such a way to minimize stiction. A study of electrostatic actuation for adaptive thermal detectors has been performed that shows only a few tenths of a volt can separate normal actuation, snap-down without stiction, and snap-down with stiction. The applied voltage needed to achieve snap-down without stiction is largely constant if the pulse width exceeds the mechanical response time, but increases dramatically if the pulse is applied for a shorter time.

Original languageEnglish (US)
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Pages60-61
Number of pages2
StatePublished - Dec 1 2006
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: Aug 21 2006Aug 24 2006

Publication series

NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Country/TerritoryUnited States
CityBig Sky, MT
Period8/21/068/24/06

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