TY - GEN
T1 - Stiction-free soft landing for infrared thermal detectors
AU - Wang, Yuyan
AU - Talghader, Joseph J
PY - 2006
Y1 - 2006
N2 - Micromachined structures that repeatedly contact their substrate must be actuated in such a way to minimize stiction. A study of electrostatic actuation for adaptive thermal detectors has been performed that shows only a few tenths of a volt can separate normal actuation, snap-down without stiction, and snap-down with stiction. The applied voltage needed to achieve snap-down without stiction is largely constant if the pulse width exceeds the mechanical response time, but increases dramatically if the pulse is applied for a shorter time.
AB - Micromachined structures that repeatedly contact their substrate must be actuated in such a way to minimize stiction. A study of electrostatic actuation for adaptive thermal detectors has been performed that shows only a few tenths of a volt can separate normal actuation, snap-down without stiction, and snap-down with stiction. The applied voltage needed to achieve snap-down without stiction is largely constant if the pulse width exceeds the mechanical response time, but increases dramatically if the pulse is applied for a shorter time.
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M3 - Conference contribution
AN - SCOPUS:34248542885
SN - 078039562X
SN - 9780780395626
T3 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
SP - 60
EP - 61
BT - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
T2 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Y2 - 21 August 2006 through 24 August 2006
ER -