Strained Si NMOSFETs for high performance CMOS technology

K. Rim, S. Koester, M. Hargrove, J. Chu, P. M. Mooney, J. Ott, T. Kanarsky, P. Ronsheim, M. Ieong, A. Grill, H. S.P. Wong

Research output: Contribution to conferencePaperpeer-review

189 Scopus citations

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Chemical Compounds

Engineering & Materials Science