| Original language | English (US) |
|---|---|
| Pages (from-to) | 847-853 |
| Number of pages | 7 |
| Journal | Shinku/Journal of the Vacuum Society of Japan |
| Volume | 47 |
| Issue number | 12 |
| DOIs | |
| State | Published - Jan 2004 |
Structure of Atmospheric Pressure Non-Equilibrium Plasmas and Appliacation to Advanced Materials Processing
Tomohiro Nozaki, Ken Okazaki, Joachim Heberlein, Uwe Kortshagen
Research output: Contribution to journal › Article › peer-review