Suspended and highly aligned carbon nanotube thin-film structures using open microfluidic channel template

Engineering & Materials Science

• Microfluidics 100%
• Carbon nanotubes 99%
• Thin films 88%
• Microfabrication 34%
• Plasma etching 20%
• Fabrication 19%
• Electromechanical devices 19%
• Raman spectroscopy 17%
• Photoresists 17%
• Fluidics 15%
• Etching 14%
• Yield stress 12%
• Flow of fluids 11%
• Characterization (materials science) 11%
• Elastic moduli 11%
• Oxygen 10%
• Scanning electron microscopy 10%
• Heating 9%
• Mechanical properties 8%

Physics & Astronomy

• templates 87%
• carbon nanotubes 81%
• thin films 48%
• alignment 41%
• electromechanical devices 19%
• fabrication 16%
• fluidics 15%
• oxygen plasma 15%
• plasma etching 15%
• masking 14%
• characterization 14%
• photoresists 14%
• yield strength 14%
• fluid flow 12%
• Raman spectroscopy 11%
• modulus of elasticity 10%
• atomic force microscopy 10%
• etching 10%
• mechanical properties 9%
• conductivity 8%
• scanning electron microscopy 8%
• electrical resistivity 8%
• heating 8%

Chemical Compounds

• Carbon Nanotube 68%
• Liquid Film 32%
• Etching 24%
• Yield Point 15%
• Young's Modulus 14%
• Atomic Force Microscopy 10%
• Raman Spectroscopy 10%
• Conductivity 8%
• Plasma 8%
• Scanning Electron Microscopy 8%
• Dioxygen 6%
• Application 4%