Suspended carbon nanotube thin film structures with high degree of alignment for NEMS switch applications

Dongjin Lee, Zhijiang Ye, Stephen A. Campbell, Tianhong Cui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We describe microfluidic channel assisted carbon nanotube (CNT) alignment followed by microfabrication and characterization of a suspended CNT thin film. The alignment of CNT is enhanced by heating the CNT dispersion, which is characterized with Raman spectroscopy yielding a high G- to D-band intensity ratio of 22 along the microfluidic flow direction. The sidewall of CNT film pattern, left in a lift-off process, is eliminated by oxygen plasma etching. The resistivity of aligned CNT film is found as 1.45 × 103 ωcm. The aligned CNT film is released by etching a sacrificial layer of amorphous silicon and characterized mechanically demonstrating a nominal high Young's modulus of 635 GPa and a yield strength of 2.4 GPa through a fixed-end beam deflection test. The lithography compatible fabrication process and the highly conductive film with an excellent mechanical property enable the aligned CNT film to be a potent candidate for nanoelectromechanical device applications.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages625-628
Number of pages4
DOIs
StatePublished - 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period6/5/116/9/11

Keywords

  • Carbon nanotube
  • NEMS switch
  • alignment
  • microfluidics

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