Abstract
Single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma were synthesized. The transmission electron microscopy (TEM) images indicated that the nanoparticles were crystalline diamond cubic Si of a highly oriented character. It was found that the nanoparticles were cubic in shape, with the surfaces having non-uniform morphologies.
Original language | English (US) |
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Pages (from-to) | 1969-1974 |
Number of pages | 6 |
Journal | Journal of Applied Physics |
Volume | 94 |
Issue number | 3 |
DOIs | |
State | Published - Aug 1 2003 |