Synthesis of highly oriented, single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma

Ameya Bapat, Christopher R. Perrey, Steven A. Campbell, C. Barry Carter, Uwe Kortshagen

Research output: Contribution to journalArticlepeer-review

63 Scopus citations

Abstract

Single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma were synthesized. The transmission electron microscopy (TEM) images indicated that the nanoparticles were crystalline diamond cubic Si of a highly oriented character. It was found that the nanoparticles were cubic in shape, with the surfaces having non-uniform morphologies.

Original languageEnglish (US)
Pages (from-to)1969-1974
Number of pages6
JournalJournal of Applied Physics
Volume94
Issue number3
DOIs
StatePublished - Aug 1 2003

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