Tents and tunnels on martensitic films

K. Bhattacharya, A. Desimone, K. F. Hane, R. D. James, C. J. Palmstrøm

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Abstract

In this paper we outline a strategy for producing certain deformable structures - tents and tunnels - on epitaxially grown martensitic single crystal films. These structures are intended to be the basic building blocks of micropumps and microactuators. We give specific predictions for the systems Ni2MnGa, PbTiO3 and Cu-Zn-Al.

Original languageEnglish (US)
Pages (from-to)685-689
Number of pages5
JournalMaterials Science and Engineering A
Volume273-275
DOIs
StatePublished - Dec 15 1999

Bibliographical note

Funding Information:
We thank A.H. Bensaoula and J. Dong for their assistance with epitaxial growth experiments. This work was partially supported by AFOSR/MURI F49620-98-1-0433 (K. Bhattacharya, K.F. Hane, R.D. James, C.J. Palmstrøm), ARO DA/DAAG55-98-1-0335 (R.D. James, K.F. Hane), NSF CMS-9457573 (K. Bhattacharya), NSF DMS-9505077 (R.D. James, K.F. Hane) and ONR/DARPA N00014-95-1-1145 and -91-J-4034 (R.D. James).

Keywords

  • Ferroelectrics
  • Ferromagnetic shape-memory alloys
  • MEMS
  • Micropumps
  • Shape-memory alloys
  • Thin-films

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