The electrical charging of micron-sized dust particles in a capacitively coupled RF plasma

U. Kortshagen, G. Mümken

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

The electrical charge of micron-sized particles in a capacitively coupled RF discharge is determined using a relatively simple theoretical model. The specific properties of the RF sheath are taken into account. The results are compared to charge measurements of particles which have been injected into the active discharge.

Original languageEnglish (US)
Pages (from-to)126-132
Number of pages7
JournalPhysics Letters, Section A: General, Atomic and Solid State Physics
Volume217
Issue number2-3
DOIs
StatePublished - Jul 8 1996

Bibliographical note

Funding Information:
was supported by the Deutsche Forschungsgemein-schaft (SFB 191).

Keywords

  • Dusty plasmas
  • RF discharges

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