Abstract
A self-consistent particle-in-cell/Monte Carlo collision (PIC/MCC) simulation is used to calculate the ion energy distribution (IED) function of ions impinging on the surface of nanoparticles in low-pressure argon plasmas. The computation includes the effects of resonant charge-exchange and elastic collisions between ions and neutrals through a Monte Carlo null-collision method and considers both Maxwellian and non-Maxwellian electron energy distributions. Results show a strong dependence of the IED on pressure. Intermediate pressures yield a remarkable reduction in the average ion energy and an enhancement in the ion flux to the surface of the nanoparticles.
Original language | English (US) |
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Article number | 035002 |
Journal | Plasma Sources Science and Technology |
Volume | 21 |
Issue number | 3 |
DOIs | |
State | Published - Jun 2012 |