The production and electrical characterization of free-standing cubic single-crystal Si nanoparticles

S. A. Campbell, U. Kortshagen, A. Bapat, Y. Dong, S. Hilchie, Z. Shen

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

This paper reviews processes to synthesize single-crystal silicon nanoparticles in an aerosol, then deposit the particles on the wafer to characterize the materials and build devices. By using plasma for particle formation, particle charge can be used to prevent particle agglomeration. This low-temperature process for constructing electronic devices never exposes the substrate to the very high temperature needed to form the single crystals.

Original languageEnglish (US)
Pages (from-to)26-28
Number of pages3
JournalJOM
Volume56
Issue number10
DOIs
StatePublished - Oct 2004

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